Chemical Systems

Chemical Delivery

  • Low cost delivery solutions
  • FM 4910/polypropylene/stainless steel cabinet
  • Single pump/filter or redundant pump/dual filter options
  • Air operated pumps or magnetically coupled electric pumps available
  • All PFA/PTFE wetted materials of construction
  • Pump/filter DI water flush, N2 purge
  • PLC/HMI or Relay Logic control
  • Mobile model is portable – can be located close to process tools
  • Designed/built to SEMI S2/S8 guidelines

Collection Products

  • Solvent or Aqueous Chemical collection
  • FM 4910/polypropylene/stainless steel cabinet
  • Dual drum or carboy
  • Auto switching of drums
  • Load cells used to measure drum levels
  • All wetted components chemically compatible
  • PLC/HMI or Relay Logic control
  • Designed/built to SEMI S2/S8 guidelines

GE Acid Manual 1-Edit

GE Solvent manual 2-Edit