HF Blending System

  • DI water blending system with 1 or 2 chemical constituents
  • Precision mixing of DI water and the chemical; PLC controlled and mix volumes validated
  • Redundant concentration controls confirm and validates blending mixture;  +/- 0.05%
  • Run-to-Run Batch Averaging algorithms.
  • User selectable blending controls; password protected
  • Mix tank circulation and fab distribution controlled by variable speed centrifugal (pulse free) pump
  • 200 liter mix tank with N2 pressure controlled blanket
  • Chemical mix sample station
  • Chemical filtration with pre and post pressure monitoring
  • User programmable DI water and/or N2 purge of mix tank and associated piping
  • Allen Bradley PLC and HMI with colored operation and maintenance animation
  • Built to SEMI® S2-0715 and S8 09-15 standards
  • Optional – FM 4910 construction
  • Entegris® valves with PrimeLock® fittings
  • DI water spray gun
  • Interior cabinet lighting
  • Operational light tower
  • Facility and operational interlocks
  • Ethernet communication interface
  • Reliability; > 99.5% availability  --  MTTR < 2 hours