NOWPak® Dispense Systems
Single or dual canister delivery system for high purity, chemicals using ATMI NOWPak® containers.
Solvents, Acids, Bases.
Supports up to two compatible chemistries per unit.
Optional fire suppression.
Complies with Class 1, Division 2 specifications.
Materials of construction:
Stainless steel cabinet.
Built (certified) to SEMI S2 & S8 codes.
PFA values and piping.