Chemical Delivery
- Low cost delivery solutions
- FM 4910/polypropylene/stainless steel cabinet
- Single pump/filter or redundant pump/dual filter options
- Air operated pumps or magnetically coupled electric pumps available
- All PFA/PTFE wetted materials of construction
- Pump/filter DI water flush, N2 purge
- PLC/HMI or Relay Logic control
- Mobile model is portable – can be located close to process tools
- Designed/built to SEMI S2/S8 guidelines
Collection Products
- Solvent or Aqueous Chemical collection
- FM 4910/polypropylene/stainless steel cabinet
- Dual drum or carboy
- Auto switching of drums
- Load cells used to measure drum levels
- All wetted components chemically compatible
- PLC/HMI or Relay Logic control
- Designed/built to SEMI S2/S8 guidelines