- DI water blending system with 1 or 2 chemical constituents
- Precision mixing of DI water and the chemical; PLC controlled and mix volumes validated
- Redundant concentration controls confirm and validates blending mixture; +/- 0.05%
- Run-to-Run Batch Averaging algorithms.
- User selectable blending controls; password protected
- Mix tank circulation and fab distribution controlled by variable speed centrifugal (pulse free) pump
- 200 liter mix tank with N2 pressure controlled blanket
- Chemical mix sample station
- Chemical filtration with pre and post pressure monitoring
- User programmable DI water and/or N2 purge of mix tank and associated piping
- Allen Bradley PLC and HMI with colored operation and maintenance animation
- Built to SEMI® S2-0715 and S8 09-15 standards
- Optional – FM 4910 construction
- Entegris® valves with PrimeLock® fittings
- DI water spray gun
- Interior cabinet lighting
- Operational light tower
- Facility and operational interlocks
- Ethernet communication interface
- Reliability; > 99.5% availability — MTTR < 2 hours